Inventor
SHARMA BED PRASAD
US5 patents
Patents
5 patentsUS11901175B2Feb 13, 2024
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
ASM IP HOLDING BV2 citations71
US11424119B2Aug 23, 2022
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
ASM IP HOLDING BV2 citations71
US11742198B2Aug 29, 2023
Structure including SiOCN layer and method of forming same
ASM IP HOLDING BV2 citations70
US12293911B2May 6, 2025
Structure including SiOCN layer and method of forming same
ASM IP HOLDING BV0 citations59
US11114294B2Sep 7, 2021
Structure including SiOC layer and method of forming same
ASM IP HOLDING BV1 citations59