Inventor
BYUN YOUNGCHOL
US5 patents
⚠️ This page may combine multiple inventors who share the name “BYUN YOUNGCHOL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
4 patentsUS11742198B2Aug 29, 2023
Structure including SiOCN layer and method of forming same
ASM IP HOLDING BV2 citations70
US12293911B2May 6, 2025
Structure including SiOCN layer and method of forming same
ASM IP HOLDING BV0 citations59
US11114294B2Sep 7, 2021
Structure including SiOC layer and method of forming same
ASM IP HOLDING BV1 citations59
US12378667B2Aug 5, 2025
Methods and systems for forming doped silicon nitride films
ASM IP HOLDING BV0 citations43