Inventor
TARABOUKHINE MIKHAIL
US6 patents
Patents
6 patentsUS12283500B2Apr 22, 2025
Methods and systems for temperature control for a substrate
APPLIED MATERIALS INC0 citations57
US11984333B2May 14, 2024
Methods and systems for temperature control for a substrate
APPLIED MATERIALS INC0 citations57
US11551951B2Jan 10, 2023
Methods and systems for temperature control for a substrate
APPLIED MATERIALS INC0 citations57
US7746473B2Jun 29, 2010
Full spectrum adaptive filtering (FSAF) for low open area endpoint detection
APPLIED MATERIALS INC2 citations57
US12160243B2Dec 3, 2024
Algorithm for accurately converting a wide range of photo signals into an electrical current
APPLIED MATERIALS INC0 citations56
US11862499B2Jan 2, 2024
Multiplexing control of multiple positional sensors in device manufacturing machines
APPLIED MATERIALS INC0 citations40