Inventor
PAIVANAS JOHN A
8 patents
Patents
8 patentsUS4270999AJun 2, 1981
Method and apparatus for gas feed control in a dry etching process
IBM71 citations95
US4165132AAug 21, 1979
Pneumatic control of the motion of objects suspended on an air film
IBM96 citations95
US4639829AJan 27, 1987
Thermal conduction disc-chip cooling enhancement means
IBM130 citations94
US4348139ASep 7, 1982
Gas film wafer transportation system
IBM44 citations91
US4257637AMar 24, 1981
Contactless air film lifting device
IBM33 citations91
US4607277AAug 19, 1986
Semiconductor assembly employing noneutectic alloy for heat dissipation
IBM59 citations90
US4395165AJul 26, 1983
Chip shuttle track
IBM25 citations77
US4474397AOct 2, 1984
Pick-up head utilizing aspirated air flow
IBM18 citations72