Inventor
LUCAS KEVIN D
US11 patents
⚠️ This page may combine multiple inventors who share the name “LUCAS KEVIN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOTOROLA INC
5 patentsUS5900340AMay 4, 1999
One dimensional lithographic proximity correction using DRC shape functions
MOTOROLA INC269 citations98
US5849440ADec 15, 1998
Process for producing and inspecting a lithographic reticle and fabricating semiconductor devices using same
MOTOROLA INC94 citations97
US5920487AJul 6, 1999
Two dimensional lithographic proximity correction using DRC shape functions
MOTOROLA INC70 citations94
US6287951B1Sep 11, 2001
Process for forming a combination hardmask and antireflective layer
MOTOROLA INC164 citations93
US6649452B2Nov 18, 2003
Method for manufacturing a lithographic reticle for transferring an integrated circuit design to a semiconductor wafer
MOTOROLA INC10 citations69
FREESCALE SEMICONDUCTOR INC
5 patentsUS6989229B2Jan 24, 2006
Non-resolving mask tiling method for flare reduction
FREESCALE SEMICONDUCTOR INC33 citations89
US6783904B2Aug 31, 2004
Lithography correction method and device
FREESCALE SEMICONDUCTOR INC27 citations88
US7284231B2Oct 16, 2007
Layout modification using multilayer-based constraints
FREESCALE SEMICONDUCTOR INC15 citations80
US6818362B1Nov 16, 2004
Photolithography reticle design
FREESCALE SEMICONDUCTOR INC4 citations60
US6933227B2Aug 23, 2005
Semiconductor device and method of forming the same
FREESCALE SEMICONDUCTOR INC1 citations52