Inventor
MATSUBARA YOSHIO
JP4 patents
Patents
4 patentsUS5107170AApr 21, 1992
Ion source having auxillary ion chamber
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US6147845ANov 14, 2000
System interconnection device and method of designing same
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US6335851B1Jan 1, 2002
Current-limiting device
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US8372239B2Feb 12, 2013
Plasma processing apparatus
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