P

Inventor

SUBRAHMANYAN SUCHITRA

US5 patents
⚠️ This page may combine multiple inventors who share the name “SUBRAHMANYAN SUCHITRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

4 patents
US6107192AAug 22, 2000

Reactive preclean prior to metallization for sub-quarter micron application

APPLIED MATERIALS INC212 citations98
US6905965B2Jun 14, 2005

Reactive preclean prior to metallization for sub-quarter micron application

APPLIED MATERIALS INC47 citations95
US6693030B1Feb 17, 2004

Reactive preclean prior to metallization for sub-quarter micron application

APPLIED MATERIALS INC34 citations92
US6110828AAug 29, 2000

In-situ capped aluminum plug (CAP) process using selective CVD AL for integrated plug/interconnect metallization

APPLIED MATERIALS INC50 citations92

(unassigned)

1 patent
US6518176B2Feb 11, 2003

Method of selective formation of a barrier layer for a contact level via

5 citations62