Inventor
NA KI-SU
KR5 patents
Patents
5 patentsUS7902059B2Mar 8, 2011
Methods of forming void-free layers in openings of semiconductor substrates
SAMSUNG ELECTRONICS CO LTD3 citations61
US7736963B2Jun 15, 2010
Method of forming a gate structure for a semiconductor device and method of forming a cell gate structure for a non-volatile memory device
SAMSUNG ELECTRONICS CO LTD5 citations61
US7459364B2Dec 2, 2008
Methods of forming self-aligned floating gates using multi-etching
SAMSUNG ELECTRONICS CO LTD4 citations61
US7629217B2Dec 8, 2009
Methods of forming void-free layers in openings of semiconductor substrates
SAMSUNG ELECTRONICS CO LTD0 citations51
US7160776B2Jan 9, 2007
Methods of forming a gate structure of a non-volatile memory device and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD0 citations51