Inventor
GALE GLENN
JP3 patents
Patents
3 patentsUS7250374B2Jul 31, 2007
System and method for processing a substrate using supercritical carbon dioxide processing
TOKYO ELECTRON LTD11 citations78
US8043521B2Oct 25, 2011
Processing apparatus
TOKYO ELECTRON LTD2 citations54
US7897498B2Mar 1, 2011
Method for manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations51