Inventor

JACOBSON GUNILLA

US3 patents

⚠️ This page may combine multiple inventors who share the name “JACOBSON GUNILLA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7250374B2Jul 31, 2007

System and method for processing a substrate using supercritical carbon dioxide processing

TOKYO ELECTRON LTD11 citations78

US7387868B2Jun 17, 2008

Treatment of a dielectric layer using supercritical CO2

TOKYO ELECTRON LTD3 citations51

PHARMACIA BIOSENSOR AB

1 patent

US5376252ADec 27, 1994

Microfluidic structure and process for its manufacture

PHARMACIA BIOSENSOR AB948 citations96