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Inventor
PALMER BENTLEY
US
2 patents
Patents
2 patents
US7250374B2
Jul 31, 2007
System and method for processing a substrate using supercritical carbon dioxide processing
TOKYO ELECTRON LTD
11 citations
78
US7307019B2
Dec 11, 2007
Method for supercritical carbon dioxide processing of fluoro-carbon films
TOKYO ELECTRON LTD
1 citations
46