Inventor
MIYAI HIROKI
JP6 patents
Patents
6 patentsUS10319088B2Jun 11, 2019
Inspection apparatus of EUV mask and its focus adjustment method
LASERTEC CORP5 citations70
US9638739B2May 2, 2017
Defect coordinates measurement device, defect coordinates measurement method, mask manufacturing method, and reference mask
LASERTEC CORP2 citations70
US10706527B2Jul 7, 2020
Correction method, correction apparatus, and inspection apparatus
LASERTEC CORP1 citations56
US11822233B2Nov 21, 2023
Image pickup apparatus and focus adjustment method using bending correction to adjust focusing
LASERTEC CORP0 citations49
US9786057B2Oct 10, 2017
Inspection apparatus, coordinate detection apparatus, coordinate detection method, and wavefront aberration correction method
LASERTEC CORP1 citations48
US10156664B2Dec 18, 2018
Mask inspection apparatus and mask inspection method
LASERTEC CORP0 citations39