Inventor

HIRAHARA ROBERT

US3 patents

Patents

3 patents

US9668373B2May 30, 2017

Substrate support chuck cooling for deposition chamber

APPLIED MATERIALS INC4 citations68

US11054317B2Jul 6, 2021

Method and apparatus for direct measurement of chucking force on an electrostatic chuck

APPLIED MATERIALS INC0 citations59

US9865489B2Jan 9, 2018

Substrate support chuck cooling for deposition chamber

APPLIED MATERIALS INC0 citations48