Inventor

YEON YE RIM

KR4 patents

⚠️ This page may combine multiple inventors who share the name “YEON YE RIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEMES CO LTD

3 patents

US11495467B2Nov 8, 2022

SAMSUNG ELECTRONICS CO LTD

1 patent

US11149234B2Oct 19, 2021

Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD0 citations47

YEON YE RIM

SEMES CO LTD

Method and apparatus for etching thin layer

Method and apparatus for substrate cleaning

Apparatus for and method of treating substrate

SAMSUNG ELECTRONICS CO LTD

Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same