Inventor
IDEGUCHI KAZUMA
JP3 patents
Patents
3 patentsUS12054841B2Aug 6, 2024
Apparatus for plating and method of plating
EBARA CORP0 citations44
US11866842B2Jan 9, 2024
Short circuit detection method in plating apparatus, control method of plating apparatus, and plating apparatus
EBARA CORP0 citations41
US11661669B2May 30, 2023
Substrate processing system, controller and method using test operation without substrate
EBARA CORP0 citations41