Inventor
TSUKIYAMA KEISHI
JP3 patents
Patents
3 patentsUS12298660B2May 13, 2025
Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same
AGC INC0 citations59
US11953822B2Apr 9, 2024
Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same
AGC INC0 citations59
US12124164B2Oct 22, 2024
Reflective mask blank and reflective mask
AGC INC0 citations56