Inventor

LORENZINI ROBERT E

US3 patents

Patents

3 patents

US4918870AApr 24, 1990

Floating subcarriers for wafer polishing apparatus

SILTEC CORP124 citations93

US4036595AJul 19, 1977

Continuous crystal growing furnace

SILTEC CORP95 citations92

US4454096AJun 12, 1984

Crystal growth furnace recharge

SILTEC CORP53 citations91