Inventor

HOUN EDWARD

TW8 patents

Patents

8 patents

US5640041AJun 17, 1997

Stress relaxation in dielectric before metallization

UNITED MICROELECTRONICS CORP43 citations95

US5665632ASep 9, 1997

Stress relaxation in dielectric before metalization

UNITED MICROELECTRONICS CORP25 citations92

US5516720AMay 14, 1996

Stress relaxation in dielectric before metallization

UNITED MICROELECTRONICS CORP23 citations92

US5661049AAug 26, 1997

Stress relaxation in dielectric before metallization

UNITED MICROELECTRONICS CORP12 citations73

US5669768ASep 23, 1997

Apparatus for adjusting a gas injector of furnace

UNITED MICROELECTRONICS CORP7 citations72

US5658833AAug 19, 1997

Method and dummy disc for uniformly depositing silicon nitride

UNITED MICROELECTRONICS CORP8 citations72

US5828036AOct 27, 1998

Method and apparatus for reflowing and annealing borophosphosilicate glass

UNITED MICROELECTRONICS CORP3 citations62

US5461011AOct 24, 1995

Method for reflowing and annealing borophosphosilicate glass to prevent BPO4 crystal formation

UNITED MICROELECTRONICS CORP3 citations62