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Inventor

WASKIEWICZ WARREN KAZMIR

US5 patents
⚠️ This page may combine multiple inventors who share the name “WASKIEWICZ WARREN KAZMIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AGERE SYSTEMS INC

3 patents
US6232040B1May 15, 2001

Method of electron beam exposure utilizing emitter with conductive mesh grid

AGERE SYSTEMS INC13 citations71
US7345290B2Mar 18, 2008

Lens array for electron beam lithography tool

AGERE SYSTEMS INC6 citations61
US6492647B1Dec 10, 2002

Electron guns for lithography tools

AGERE SYSTEMS INC4 citations60

AGERE SYST GUARDIAN CORP

1 patent
US6400090B2Jun 4, 2002

Electron emitters for lithography tools

AGERE SYST GUARDIAN CORP14 citations82

LUCENT TECHNOLOGIES INC

1 patent
US5663568ASep 2, 1997

Apparatus for controlling a charged particle beam and a lithographic process in which the apparatus is used

LUCENT TECHNOLOGIES INC11 citations70