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Inventor
MAURY PASCALE ANNE
NL
3 patents
⚠️ This page may combine multiple inventors who share the name “MAURY PASCALE ANNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
1 patent
US10527946B2
Jan 7, 2020
Method and apparatus for direct write maskless lithography
ASML NETHERLANDS BV
3 citations
64
BEST KEITH FRANK
1 patent
US8576374B2
Nov 5, 2013
Lithographic apparatus and method
BEST KEITH FRANK
3 citations
54
IOSAD NIKOLAY
1 patent
US9274418B2
Mar 1, 2016
Imprint lithography apparatus and method
IOSAD NIKOLAY
0 citations
37