Inventor

BÄUMER STEFAN MICHAEL BRUNO

NL5 patents

⚠️ This page may combine multiple inventors who share the name “BÄUMER STEFAN MICHAEL BRUNO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US10725381B2Jul 28, 2020

Optical systems, metrology apparatus and associated method

ASML NETHERLANDS BV3 citations71

US10983361B2Apr 20, 2021

Methods of aligning a diffractive optical system and diffracting beams, diffractive optical element and apparatus

ASML NETHERLANDS BV0 citations60

US12007693B2Jun 11, 2024

Laser focussing module

ASML NETHERLANDS BV0 citations38

TNO

1 patent

US10712674B2Jul 14, 2020

Method of determining an overlay error, manufacturing method and system for manufacturing of a multilayer semiconductor device, and semiconductor device manufactured thereby

TNO0 citations38

Nederlandse Organisatie Voor Toegepast—Natuurwetenschappelijk Onderzoek Tno

1 patent

US11378448B2Jul 5, 2022

Optical device and spectrometer comprising such a device

Nederlandse Organisatie Voor Toegepast—Natuurwetenschappelijk Onderzoek Tno0 citations37