Inventor
SAWAZAKI NAOKI
JP4 patents
Patents
4 patentsUS11521865B2Dec 6, 2022
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD4 citations70
US9956594B2May 1, 2018
Substrate processing method
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US12271830B2Apr 8, 2025
Learned model generating method, abnormality factor estimating device, substrate processing device, abnormality factor estimating method, learning method, learning device, and learning data generating method
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US10854481B2Dec 1, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations36