Inventor
OKUMURA YUZO
JP6 patents
Patents
6 patentsUS12588446B2Mar 24, 2026
Surface treatment composition and method for producing wafer
CENTRAL GLASS CO LTD0 citations59
US12163087B2Dec 10, 2024
Surface treatment agent and method for manufacturing surface treatment body
CENTRAL GLASS CO LTD0 citations49
US12098319B2Sep 24, 2024
Liquid chemical for forming water-repellent protective film, method for preparing same, and method for manufacturing surface-treated body
CENTRAL GLASS CO LTD0 citations49
US11817310B2Nov 14, 2023
Bevel portion treatment agent composition and method of manufacturing wafer
CENTRAL GLASS CO LTD0 citations49
US11670498B2Jun 6, 2023
Surface treatment agent and surface-treated body manufacturing method
CENTRAL GLASS CO LTD0 citations49
US11282709B2Mar 22, 2022
Chemical agent for forming water repellent protective film and surface treatment method for wafers
CENTRAL GLASS CO LTD0 citations47