Inventor

TAN TED

US2 patents

⚠️ This page may combine multiple inventors who share the name “TAN TED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORPORATION

1 patent

US12598948B2Apr 7, 2026

Purging spindle arms to prevent deposition and wafer sliding

LAM RES CORPORATION0 citations55

LAM RES CORP

1 patent

US12362153B2Jul 15, 2025

Pedestal setup using camera wafer

LAM RES CORP0 citations50