Inventor
KOBORI SHIGEYUKI
JP9 patents
Patents
9 patentsUS4802952AFeb 7, 1989
Method for manufacturing semiconductor absolute pressure sensor units
HITACHI LTD75 citations96
US4737787AApr 12, 1988
Two-wire communication system
HITACHI LTD56 citations96
US4322980AApr 6, 1982
Semiconductor pressure sensor having plural pressure sensitive diaphragms and method
HITACHI LTD77 citations96
US4291293ASep 22, 1981
Semiconductor absolute pressure transducer assembly and method
HITACHI LTD68 citations95
US5095750AMar 17, 1992
Accelerometer with pulse width modulation
HITACHI LTD48 citations92
US4670969AJun 9, 1987
Method of making silicon diaphragm pressure sensor
HITACHI LTD44 citations92
US4527428AJul 9, 1985
Semiconductor pressure transducer
HITACHI LTD31 citations92
US4550612ANov 5, 1985
Integrated pressure sensor
HITACHI LTD10 citations73
US4511878AApr 16, 1985
Pressure sensor with improved semiconductor diaphragm
HITACHI LTD15 citations73