Inventor

MIYAMURA TADASHI

JP3 patents

Patents

3 patents

US4902934AFeb 20, 1990

Plasma apparatus

SUMITOMO METAL IND77 citations91

US5645644AJul 8, 1997

Plasma processing apparatus

SUMITOMO METAL IND46 citations89

US4671907AJun 9, 1987

Method of manufacturing carbon materials

SUMITOMO METAL IND14 citations70