Inventor
SMESNY GREG A
US3 patents
Patents
3 patentsUS5444637AAug 22, 1995
Programmable semiconductor wafer for sensing, recording and retrieving fabrication process conditions to which the wafer is exposed
ADVANCED MICRO DEVICES INC252 citations97
US5354413AOct 11, 1994
Electrode position controller for a semiconductor etching device
ADVANCED MICRO DEVICES INC62 citations94
US5455894AOct 3, 1995
Wafer fabrication robotic interface unit
ADVANCED MICRO DEVICES INC41 citations88