Inventor
MEURIS MARK
BE4 patents
Patents
4 patentsUS6491764B2Dec 10, 2002
Method and apparatus for removing a liquid from a surface of a rotating substrate
IMEC INTER UNI MICRO ELECTR196 citations97
US6568408B2May 27, 2003
Method and apparatus for removing a liquid from a surface of a rotating substrate
IMEC INTER UNI MICRO ELECTR43 citations95
US6261377B1Jul 17, 2001
Method of removing particles and a liquid from a surface of substrate
IMEC INTER UNI MICRO ELECTR21 citations91
US6676765B2Jan 13, 2004
Method of removing particles and a liquid from a surface of substrate
IMEC INTER UNI MICRO ELECTR6 citations72