Inventor
ZEITLIN VLADIMIR J
US8 patents
⚠️ This page may combine multiple inventors who share the name “ZEITLIN VLADIMIR J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
6 patentsUS6172337B1Jan 9, 2001
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC190 citations98
US6403925B1Jun 11, 2002
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC47 citations95
US6046439AApr 4, 2000
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC49 citations95
US6002109ADec 14, 1999
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC80 citations95
US6399921B1Jun 4, 2002
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC20 citations92
US6043460AMar 28, 2000
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC19 citations92