Inventor
NIMMAKAYALA PAWAN K
US4 patents
Patents
4 patentsUS7298456B2Nov 20, 2007
System for varying dimensions of a substrate during nanoscale manufacturing
MOLECULAR IMPRINTS INC45 citations95
US7170589B2Jan 30, 2007
Apparatus to vary dimensions of a substrate during nano-scale manufacturing
MOLECULAR IMPRINTS INC45 citations95
US7420654B2Sep 2, 2008
Method of varying dimensions of a substrate during nano-scale manufacturing
MOLECULAR IMPRINTS INC34 citations92
US7323130B2Jan 29, 2008
Magnification correction employing out-of-plane distortion of a substrate
MOLECULAR IMPRINTS INC45 citations92