Inventor
KUMAZAWA SATOSHI
JP8 patents
Patents
8 patentsUS9649775B2May 16, 2017
Workpiece dividing method
DISCO CORP7 citations79
US10177004B2Jan 8, 2019
Method of processing wafer
DISCO CORP2 citations69
US11577339B2Feb 14, 2023
Optical axis adjusting method for laser processing apparatus
DISCO CORP0 citations48
US12121993B2Oct 22, 2024
Method of processing workpiece and laser processing apparatus
DISCO CORP0 citations47
US11373907B2Jun 28, 2022
Method of manufacturing device chip
DISCO CORP0 citations47
US10679897B2Jun 9, 2020
Device wafer processing method
DISCO CORP0 citations39
US10354919B2Jul 16, 2019
Wafer dividing method
DISCO CORP0 citations39
US10796926B2Oct 6, 2020
Method of manufacturing glass interposer
DISCO CORP0 citations38