Inventor

GRILLE THOMAS

AT33 patents

⚠️ This page may combine multiple inventors who share the name “GRILLE THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GRILLE THOMAS

INFINEON TECHNOLOGIES AG

Micromechanical structure and method for manufacturing the same

Method for simultaneous structuring and chip singulation

Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same

Micro mechanical structure and method for fabricating the same

Sensing systems and methods using a coupling structure

Sensing systems and methods using a coupling structure

Liquid sensing systems and methods using a ring resonator sensor

Bandpass transmission filter and narrowband radiation source

Gas sensor

Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device

Method of manufacturing semiconductor devices

Pillar photonic crystal

MEMS structure and method for detecting a change in a parameter

Photonic crystal sensor structure and a method for manufacturing the same

Method for simultaneous structuring and chip singulation

Photonic crystal sensor structure and a method for manufacturing the same

Micromechanical structure and method for fabricating the same

Semiconductor devices, a fluid sensor and a method for forming a semiconductor device

Semiconductor devices, a fluid sensor and a method for forming a semiconductor device

System and method for a capacitive thermometer

Fluid sensor including an optical filter and a waveguide, and method for manufacturing the fluid sensor

MEMS-component

Device and method for emitting electromagnetic radiation

Sensor and method for detecting guided thermal radiation

Sensor and method for performing a reference measurement with guided thermal radiation

Optical resonator system, narrowband mid-infrared radiation source

Micromechanical structure comprising carbon material and method for fabricating the same

Method for manufacturing a plurality of microphone structures, microphone and mobile device

GRILLE THOMAS

Method for processing a wafer at unmasked areas and previously masked areas to reduce a wafer thickness

Production of adhesion structures in dielectric layers using photoprocess technology and devices incorporating adhesion structures

FRIZA WOLFGANG

Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same

JAKOBY BERNHARD

Opto-electronic sensor

DENIFL GUENTER

Processing a sacrificial material during manufacture of a microfabricated product