Inventor
HEDENIG URSULA
AT20 patents
⚠️ This page may combine multiple inventors who share the name “HEDENIG URSULA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
17 patentsUS10710874B2Jul 14, 2020
Micromechanical structure and method for manufacturing the same
INFINEON TECHNOLOGIES AG9 citations83
US9610543B2Apr 4, 2017
Method for simultaneous structuring and chip singulation
INFINEON TECHNOLOGIES AG2 citations72
US9212045B1Dec 15, 2015
Micro mechanical structure and method for fabricating the same
INFINEON TECHNOLOGIES AG6 citations72
US10345227B2Jul 9, 2019
Sensing systems and methods using a coupling structure
INFINEON TECHNOLOGIES AG4 citations71
US9702813B2Jul 11, 2017
Sensing systems and methods using a coupling structure
INFINEON TECHNOLOGIES AG3 citations71
US9618693B2Apr 11, 2017
Liquid sensing systems and methods using a ring resonator sensor
INFINEON TECHNOLOGIES AG2 citations71
US10516943B2Dec 24, 2019
Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device
INFINEON TECHNOLOGIES AG2 citations70
US9748140B1Aug 29, 2017
Method of manufacturing semiconductor devices
INFINEON TECHNOLOGIES AG2 citations67
US10247671B2Apr 2, 2019
Photonic crystal sensor structure and a method for manufacturing the same
INFINEON TECHNOLOGIES AG0 citations51
US10005659B2Jun 26, 2018
Method for simultaneous structuring and chip singulation
INFINEON TECHNOLOGIES AG0 citations51
US9903816B2Feb 27, 2018
Photonic crystal sensor structure and a method for manufacturing the same
INFINEON TECHNOLOGIES AG1 citations51
US10081533B2Sep 25, 2018
Micromechanical structure and method for fabricating the same
INFINEON TECHNOLOGIES AG1 citations50
US10461203B2Oct 29, 2019
Semiconductor devices, a fluid sensor and a method for forming a semiconductor device
INFINEON TECHNOLOGIES AG0 citations48
US9941432B2Apr 10, 2018
Semiconductor devices, a fluid sensor and a method for forming a semiconductor device
INFINEON TECHNOLOGIES AG0 citations48
US9939331B2Apr 10, 2018
System and method for a capacitive thermometer
INFINEON TECHNOLOGIES AG0 citations48
US10106398B2Oct 23, 2018
Micromechanical structure comprising carbon material and method for fabricating the same
INFINEON TECHNOLOGIES AG0 citations40
US9439017B2Sep 6, 2016
Method for manufacturing a plurality of microphone structures, microphone and mobile device
INFINEON TECHNOLOGIES AG0 citations40
GRILLE THOMAS
2 patentsUS8871550B2Oct 28, 2014
Method for processing a wafer at unmasked areas and previously masked areas to reduce a wafer thickness
GRILLE THOMAS2 citations57
US10217644B2Feb 26, 2019
Production of adhesion structures in dielectric layers using photoprocess technology and devices incorporating adhesion structures
GRILLE THOMAS0 citations30