Inventor
THERIAULT VICTOR J
US5 patents
⚠️ This page may combine multiple inventors who share the name “THERIAULT VICTOR J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
4 patentsUS6530732B1Mar 11, 2003
Single substrate load lock with offset cool module and buffer chamber
BROOKS AUTOMATION INC59 citations93
US6079928AJun 27, 2000
Dual plate gas assisted heater module
BROOKS AUTOMATION INC24 citations89
US5931626AAug 3, 1999
Robot mounting de-coupling technique
BROOKS AUTOMATION INC10 citations70
US6231289B1May 15, 2001
Dual plate gas assisted heater module
BROOKS AUTOMATION INC6 citations60