Inventor

LIU YUHTURNG

TW2 patents

Patents

2 patents

US6824452B1Nov 30, 2004

Polishing pad and process of chemical mechanical use thereof

MACRONIX INT CO LTD4 citations60

US6509249B1Jan 21, 2003

Method of fabricating shallow trench isolation

MACRONIX INT CO LTD5 citations57