Inventor

SEO SUNG BUM

KR2 patents

⚠️ This page may combine multiple inventors who share the name “SEO SUNG BUM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DOOSAN MECATEC CO LTD

1 patent

US7537512B2May 26, 2009

Multiple fluid supplying apparatus for carrier of semiconductor wafer polishing system

DOOSAN MECATEC CO LTD6 citations59

K C TECH CO LTD

1 patent

US7674156B2Mar 9, 2010

Cleaning device for chemical mechanical polishing equipment

K C TECH CO LTD4 citations57