Inventor
BURKE ROBERT
CA26 patents
⚠️ This page may combine multiple inventors who share the name “BURKE ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
12 patentsUS7071043B2Jul 4, 2006
Methods of forming a field effect transistor having source/drain material over insulative material
MICRON TECHNOLOGY INC114 citations99
US6936507B2Aug 30, 2005
Method of forming field effect transistors
MICRON TECHNOLOGY INC80 citations99
US6537910B1Mar 25, 2003
Forming metal silicide resistant to subsequent thermal processing
MICRON TECHNOLOGY INC284 citations98
US7465616B2Dec 16, 2008
Method of forming a field effect transistor
MICRON TECHNOLOGY INC26 citations96
US8802520B2Aug 12, 2014
Method of forming a field effect transistor having source/drain material over insulative material
MICRON TECHNOLOGY INC12 citations93
US7470576B2Dec 30, 2008
Methods of forming field effect transistor gate lines
MICRON TECHNOLOGY INC13 citations93
US7118950B2Oct 10, 2006
Method of forming a field effect transistor
MICRON TECHNOLOGY INC12 citations93
US6090677AJul 18, 2000
Methods of thermal processing and rapid thermal processing
MICRON TECHNOLOGY INC21 citations92
US6287927B1Sep 11, 2001
Methods of thermal processing and rapid thermal processing
MICRON TECHNOLOGY INC11 citations73
US6210813B1Apr 3, 2001
Forming metal silicide resistant to subsequent thermal processing
MICRON TECHNOLOGY INC12 citations73
US7166896B2Jan 23, 2007
Cross diffusion barrier layer in polysilicon
MICRON TECHNOLOGY INC4 citations58
US7214613B2May 8, 2007
Cross diffusion barrier layer in polysilicon
MICRON TECHNOLOGY INC0 citations47