Inventor
ANGER KLAUS
DE8 patents
Patents
8 patentsUS4514638AApr 30, 1985
Electron-optical system with variable-shaped beam for generating and measuring microstructures
SIEMENS AG31 citations92
US4140913AFeb 20, 1979
Charged-particle beam optical apparatus for the reduction imaging of a mask on a specimen
SIEMENS AG32 citations91
US4090077AMay 16, 1978
Particle beam device with a deflection system and a stigmator
SIEMENS AG8 citations72
US4393308AJul 12, 1983
High current electron source
SIEMENS AG10 citations70
US4136285AJan 23, 1979
Method for irradiating a specimen by corpuscular-beam radiation
SIEMENS AG12 citations70
US4335309AJun 15, 1982
Method and device for the rapid deflection of a particle beam
SIEMENS AG10 citations68
US4246487AJan 20, 1981
Method and device for determining the focal length of a long focal length electron optical lens
SIEMENS AG6 citations62
US4238680ADec 9, 1980
Method and device for setting and correcting errors of an electron optical condenser of a microprojector
SIEMENS AG6 citations62