Inventor
LINDSTROM PAUL R
US7 patents
Patents
7 patentsUS5269847ADec 14, 1993
Variable rate distribution gas flow reaction chamber
APPLIED MATERIALS INC161 citations98
US5455070AOct 3, 1995
Variable rate distribution gas flow reaction chamber
APPLIED MATERIALS INC41 citations92
US4928626AMay 29, 1990
Reactant gas injection for IC processing
APPLIED MATERIALS INC40 citations92
US5121531AJun 16, 1992
Refractory susceptors for epitaxial deposition apparatus
APPLIED MATERIALS INC38 citations90
US5476359ADec 19, 1995
Robotically loaded epitaxial deposition apparatus
APPLIED MATERIALS INC14 citations80
US5374159ADec 20, 1994
Robotically loaded epitaxial deposition apparatus
APPLIED MATERIALS INC17 citations80
US5116181AMay 26, 1992
Robotically loaded epitaxial deposition apparatus
APPLIED MATERIALS INC8 citations71