Inventor
BAKSHI VIVEK
US3 patents
Patents
3 patentsUS7250620B2Jul 31, 2007
EUV lithography filter
SEMATECH INC20 citations89
US7709816B2May 4, 2010
Systems and methods for monitoring and controlling the operation of extreme ultraviolet (EUV) light sources used in semiconductor fabrication
SEMATECH INC5 citations60
US7760341B2Jul 20, 2010
Systems and methods for in-situ reflectivity degradation monitoring of optical collectors used in extreme ultraviolet (EUV) lithography processes
SEMATECH INC5 citations59