Inventor

BROERS SANDER C

NL3 patents

⚠️ This page may combine multiple inventors who share the name “BROERS SANDER C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

US7604359B2Oct 20, 2009

High positioning reproducible low torque mirror-actuator interface

ZEISS CARL SMT AG3 citations56

US7699480B2Apr 20, 2010

High positioning reproducible low torque mirror-actuator interface

ZEISS CARL SMT AG0 citations45

SOEMERS HERMAN M J R

1 patent

US8256912B2Sep 4, 2012

High positioning reproducible low torque mirror-actuator interface

SOEMERS HERMAN M J R1 citations47