Inventor
LEE CHRIS
US46 patents
⚠️ This page may combine multiple inventors who share the name “LEE CHRIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS6921724B2Jul 26, 2005
Variable temperature processes for tunable electrostatic chuck
LAM RES CORP102 citations97
US6617257B2Sep 9, 2003
Method of plasma etching organic antireflective coating
LAM RES CORP35 citations89
US7361607B2Apr 22, 2008
Method for multi-layer resist plasma etch
LAM RES CORP8 citations74
US7186661B2Mar 6, 2007
Method to improve profile control and N/P loading in dual doped gate applications
LAM RES CORP6 citations71
US7141505B2Nov 28, 2006
Method for bilayer resist plasma etch
LAM RES CORP9 citations69
US7682980B2Mar 23, 2010
Method to improve profile control and N/P loading in dual doped gate applications
LAM RES CORP3 citations61
LEE CHRIS
3 patentsZAP SURGICAL SYSTEMS INC
3 patentsUS11844637B2Dec 19, 2023
Therapeutic radiation beam detector for radiation treatment systems
ZAP SURGICAL SYSTEMS INC2 citations69
US10499861B2Dec 10, 2019
Self-shielded, integrated-control radiosurgery system
ZAP SURGICAL SYSTEMS INC3 citations69
US12220270B2Feb 11, 2025
Imaging systems and methods for image-guided radiosurgery
ZAP SURGICAL SYSTEMS INC0 citations59