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Inventor
HERMANOWSKI JAMES
US
6 patents
⚠️ This page may combine multiple inventors who share the name “HERMANOWSKI JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GEORGE GREGORY
2 patents
US8267143B2
Sep 18, 2012
Apparatus for mechanically debonding temporary bonded semiconductor wafers
GEORGE GREGORY
23 citations
90
US8919412B2
Dec 30, 2014
Apparatus for thermal-slide debonding of temporary bonded semiconductor wafers
GEORGE GREGORY
3 citations
60
SUSS MICROTEC LITHOGRAPHY GMBH
2 patents
US9281229B2
Mar 8, 2016
Method for thermal-slide debonding of temporary bonded semiconductor wafers
SUSS MICROTEC LITHOGRAPHY GMBH
3 citations
71
US8343300B2
Jan 1, 2013
Automated thermal slide debonder
SUSS MICROTEC LITHOGRAPHY GMBH
5 citations
70
JOHNSON HALE
1 patent
US8181688B2
May 22, 2012
Apparatus for temporary wafer bonding and debonding
JOHNSON HALE
25 citations
87
COGGER JEFFREY
1 patent
US8699138B2
Apr 15, 2014
Multi-wavelength multi-lamp radiation sources and systems and apparatuses incorporating same
COGGER JEFFREY
3 citations
44