Inventor

STILES MATTHEW

US6 patents

⚠️ This page may combine multiple inventors who share the name “STILES MATTHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GEORGE GREGORY

2 patents

US8267143B2Sep 18, 2012

Apparatus for mechanically debonding temporary bonded semiconductor wafers

GEORGE GREGORY23 citations90

US8919412B2Dec 30, 2014

Apparatus for thermal-slide debonding of temporary bonded semiconductor wafers

GEORGE GREGORY3 citations60

JOHNSON HALE

1 patent

US8181688B2May 22, 2012

Apparatus for temporary wafer bonding and debonding

JOHNSON HALE25 citations87

SUSS MICROTEC LITHOGRAPHY GMBH

1 patent

US9281229B2Mar 8, 2016

Method for thermal-slide debonding of temporary bonded semiconductor wafers

SUSS MICROTEC LITHOGRAPHY GMBH3 citations71

SUSS MICROTEC INC

1 patent

US7612895B2Nov 3, 2009

Apparatus and method for in-situ monitoring of wafer bonding time

SUSS MICROTEC INC4 citations58

BIOTEK INSTR INC

1 patent

US9366686B2Jun 14, 2016

Microplate stacker for plates with lids

BIOTEK INSTR INC2 citations57