Inventor
KEMPTER CHRISTIAN
DE7 patents
⚠️ This page may combine multiple inventors who share the name “KEMPTER CHRISTIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
6 patentsUS10061202B2Aug 28, 2018
Methods and devices for driving micromirrors
ZEISS CARL SMT GMBH0 citations49
US8345224B2Jan 1, 2013
Methods and devices for driving micromirrors
ZEISS CARL SMT GMBH1 citations49
US9767068B2Sep 19, 2017
Microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations47
US10025203B2Jul 17, 2018
Method and arrangement for actuating an element
ZEISS CARL SMT GMBH0 citations42
US10078271B2Sep 18, 2018
Optical component
ZEISS CARL SMT GMBH0 citations36
US10128429B2Nov 13, 2018
Piezoelectric positioning device and positioning method by means of such a piezoelectric positioning device
ZEISS CARL SMT GMBH0 citations26