Inventor
LIM HONGTAEK
KR4 patents
Patents
4 patentsUS11476151B2Oct 18, 2022
Vacuum chuck, substrate processing apparatus including the same and related method of manufacture
SAMSUNG ELECTRONICS CO LTD4 citations66
US12463018B2Nov 4, 2025
Edge ring, substrate processing apparatus having the same and method of manufacturing semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations47
US12424439B2Sep 23, 2025
Method of depositing atomic layer and method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations45
US10468234B2Nov 5, 2019
Gas mixer and semiconductor device fabricating apparatuses including the same
SAMSUNG ELECTRONICS CO LTD0 citations44