Inventor
KUNG POHAN
TW4 patents
Patents
4 patentsUS11961891B2Apr 16, 2024
Structure for metal gate electrode and method of fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US11282934B2Mar 22, 2022
Structure for metal gate electrode and method of fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11271103B2Mar 8, 2022
Semiconductor device and manufacturing process thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10515807B1Dec 24, 2019
Methods of fabricating semiconductor devices with metal-gate work-function tuning layers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49