Inventor

BOHLMAN JAMES G

US4 patents

Patents

4 patents

US4920073AApr 24, 1990

Selective silicidation process using a titanium nitride protective layer

TEXAS INSTRUMENTS INC67 citations95

US4836905AJun 6, 1989

Processing apparatus

TEXAS INSTRUMENTS INC117 citations94

US4872938AOct 10, 1989

Processing apparatus

TEXAS INSTRUMENTS INC51 citations91

US4888820ADec 19, 1989

Stacked insulating film including yttrium oxide

TEXAS INSTRUMENTS INC31 citations90