Inventor
HELMBRECHT MICHAEL ALBERT
US4 patents
Patents
4 patentsUS7138745B1Nov 21, 2006
Method and apparatus for an actuator system with integrated control
IRIS AO INC54 citations92
US7699296B1Apr 20, 2010
Method and apparatus for an actuator having an intermediate frame
IRIS AO INC29 citations89
US7629725B1Dec 8, 2009
Micromechanical actuator with asymmetrically shaped electrodes
IRIS AO INC7 citations70
US7741685B1Jun 22, 2010
Method and apparatus for an actuator system having buried interconnect lines
IRIS AO INC2 citations59