Inventor
ITO ETSUJI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “ITO ETSUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS10651012B2May 12, 2020
Substrate processing method
TOKYO ELECTRON LTD3 citations72
US9390943B2Jul 12, 2016
Substrate processing apparatus
TOKYO ELECTRON LTD4 citations72
US9978566B2May 22, 2018
Plasma etching method
TOKYO ELECTRON LTD2 citations71
US10699935B2Jun 30, 2020
Semiconductor manufacturing device and processing method
TOKYO ELECTRON LTD1 citations62
US7368876B2May 6, 2008
Plasma processing apparatus
TOKYO ELECTRON LTD3 citations61
US10943766B2Mar 9, 2021
Power feed member and substrate processing apparatus
TOKYO ELECTRON LTD0 citations49
US8895454B2Nov 25, 2014
Etching method of multilayer film
TOKYO ELECTRON LTD0 citations40
US10763087B2Sep 1, 2020
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations36